Advanced Technology Qualifications

KLA Tencor, Cleanroom

Milpitas, CA

TYPE: SIZE:

Tenant Improvement 1,500 SF

AlfaTech provided the full design including architectural, structural, mechanical, process, plumbing and electrical system design for the relocation of an existing copy center, and conversion of the existing copy center space into an AMC compliant Class 100 clean room, and the reconfiguration of adjacent existing cubicles to protect CTO group IP. Design included new HVAC units for the cleanroom expansion, AMC filtration and the addition of new FFUs, new process utility trench line to route new CDA and N2 lines as well as dedicated chilled water line to support new HVAC units along with CDA, N2, PV and house vacuum distribution piping to tools in the project area.

Project Highlights • Class 100 Clean Room • AMC Filtration • Dedicated chilled water line