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MKS INSTRUMENTS

Milpitas, CA

Type: Office, Cleanroom Size: 104,000 SF

MKS Instruments (formerly Spectra-Physics) is a manufacturer of lasers. AlfaTech provided mechanical and electrical engineering and technology design services for their relocation to a new 104,000 square foot facility in Milpitas. The project included offices, electronic labs and support spaces as well as a 24,800 sf class 10,000 cleanroom. AT designed all of the process piping for the facility including CDA, de- ionized water, nitrogen, vacuum, process cooling water and other gasses. To save cost, some of the certified piping at their existing facility was reused in the new cleanroom to maintain high levels of purity in the gas piping.